4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices with Thick GaN Epitaxy on Sapphire Substrates

Enrico Brusaterra, Ferdinand-Braun-Institut
Eldad Bahat Treidel, Ferdinand-Braun-Institut, Berlin, Germany
Alexander K├╝lberg, Ferdinand-Braun-Institut (FBH)
Frank Brunner, Ferdinand-Braun-Institut, Berlin, Germany
Mihaela Wolf, Ferdinand-Braun-Institut, Berlin, Germany
Oliver Hilt, Ferdinand-Braun-Institut (FBH)
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