4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices with Thick GaN Epitaxy on Sapphire Substrates

Enrico Brusaterra, Ferdinand-Braun-Institut (FBH)
Eldad Bahat Treidel, Ferdinand-Braun-Institut (FBH)
Alexander Külberg, Ferdinand-Braun-Institut (FBH)
Frank Brunner, Ferdinand-Braun-Institut (FBH)
Mihaela Wolf, Ferdinand-Braun-Institut (FBH)
Oliver Hilt, Ferdinand-Braun-Institut (FBH)
Loader Loading...
EAD Logo Taking too long?

Reload Reload document
| Open Open in new tab

Download [616.59 KB]