4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices with Thick GaN Epitaxy on Sapphire Substrates

Enrico Brusaterra, Ferdinand-Braun-Institut (FBH)
Eldad Bahat Treidel, Ferdinand-Braun-Institut (FBH)
Alexander Külberg, Ferdinand-Braun-Institut (FBH)
Frank Brunner, Ferdinand-Braun-Institut (FBH)
Mihaela Wolf, Ferdinand-Braun-Institut (FBH)
Oliver Hilt, Ferdinand-Braun-Institut (FBH)

4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices