6.1.2021 GaN Through-substrate Via Process for GaN-on-GaN HEMT Power Amplifiers

N. Okamoto, Fujitsu Limited and Fujitsu Laboratories Ltd.
A. Takahashi, Fujitsu Limited and Fujitsu Laboratories Ltd
Y. Minoura, Fujitsu Limited and Fujitsu Laboratories Ltd
Y. Kumazaki, Fujitsu Limited and Fujitsu Laboratories Ltd
S. Ozaki, Fujitsu Limited and Fujitsu Laboratories Ltd
J. Kotani, Fujitsu Limited and Fujitsu Laboratories Ltd
T. Ohki, Fujitsu Limited and Fujitsu Laboratories Ltd
N. Kurahash, Fujitsu Limited
M. Sato, Fujitsu Limited
N. Hara, Fujitsu Limited and Fujitsu Laboratories Ltd
K. Watanabe, Fujitsu Limited and Fujitsu Laboratories Ltd
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