18.10 Processing of Vertical GaN Power Devices via Silicon Nitride Shadowed Selective Area Growth - CS MANTECH Conference CS MANTECH Conference

May 12, 2022 // 3:20pm

18.10 Processing of Vertical GaN Power Devices via Silicon Nitride Shadowed Selective Area Growth

Frank Kelly, University of Illinois at Urbana-Champaign

Matthew Landi, University of Illinois at Urbana-Champaign

Kyekyoon Kim, University of Illinois at Urbana-Champaign

Student Presentation

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