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Alexander Külberg
Ferdinand-Braun-Institut (FBH)
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4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices with Thick GaN Epitaxy on Sapphire Substrates
Enrico Brusaterra, Ferdinand-Braun-Institut (FBH)Eldad Bahat Treidel, Ferdinand-Braun-Institut (FBH)Alexander Külberg, Ferdinand-Braun-Institut (FBH)Frank Brunner, Ferdinand-Braun-Institut (FBH)Mihaela Wolf, Ferdinand-Braun-Institut (FBH)Oliver Hilt, Ferdinand-Braun-Institut (FBH)