Alexander Külberg

Ferdinand-Braun-Institut (FBH)

  • 4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices with Thick GaN Epitaxy on Sapphire Substrates

    Enrico Brusaterra, Ferdinand-Braun-Institut (FBH)
    Eldad Bahat Treidel, Ferdinand-Braun-Institut (FBH)
    Alexander Külberg, Ferdinand-Braun-Institut (FBH)
    Frank Brunner, Ferdinand-Braun-Institut (FBH)
    Mihaela Wolf, Ferdinand-Braun-Institut (FBH)
    Oliver Hilt, Ferdinand-Braun-Institut (FBH)

    4.1.4.2024 Wafer Bow Tuning with Stealth Laser Patterning for Vertical High Voltage Devices