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C. Bolton
SPTS, Newport, UK
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May 12, 2022 // 3:20pm
18.13 Rounded Base Corners in SiC Trenches for Power MOSFETs
Kevin Riddell, SPTS, Newport, UKA. Croot, KLA Corporation (SPTS Division)C. Bolton, SPTS, Newport, UKB. Jones, Swansea UniversityF. Monaghan, Swansea University, Swansea, UKJ. Mitchell, KLA Corporation (SPTS Division)M. R. Jennings, Swansea University, Swansea, UKO. J. Guy, Centre for Integrative Semiconductor Materials (CISM),Download Paper