In this work we compare non-contact charge-voltage imaging and UV-photoluminescence (UV-PL) imaging of yield killer defects in epitaxial 4H-SiC wafers. Two significant findings are based on macro- and micro-scale imaging, respectively. 1- Whole wafer images demonstrate that only a fraction of the UV-PL defects in triangular, downfall and carrot categories are electrically active. 2- Micro-scale images reveal similarities and differences between PL and electrical defect images. Presented for the first time, micrometer resolution leakage patterns within triangular defects are consistent with the microstructure modeling in reference 1. The results imply that the depletion layer leakage within killer defects corresponds to exposed 3C-SiC polytypes. This leakage may be a consequence of the lower 2.2eV energy gap of 3C-SiC compared to 3.3eV in 4H-SiC.
Dmitriy Marinskiy
Semilab SDI, Tampa, FL,
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Micro-scale Imaging of Electrical Activity of Yield Killer Defects in 4H-SiC with Charge Assisted KFM and UV-Photoluminescence
Jacek Lagowski, Semilab SDI, Tampa, FL,Marshall Wilson, Semilab SDI, Tampa, FL,David Greenock, X-FabDmitriy Marinskiy, Semilab SDI, Tampa, FL,Alexandre Savtchouk, Semilab SDIAnthony Ross III, Semilab SDICarlos Almeida, Semilab SDIBret Schrayer, Semilab SDI, Tampa, FL,John D’Amico, Semilab SDIDownload Paper -
11.2 Bias Stress-Induced Interfacial Instability Characterization in Oxidized SiC with Novel Non-contact Approach
Marshall Wilson, Semilab SDI, Tampa, FL,Alexandre Savtchouk, Semilab SDIDmitriy Marinskiy, Semilab SDI, Tampa, FL,Jacek Lagowski, Semilab SDI, Tampa, FL, -
May 19, 2022 // 1:50pm
17.2 Top Surface Edge Contact for Wafer Level Electrical Characterization of 2DEG in AlGaN/GaN on Semi-insulating Wafers
Dmitriy Marinskiy, Semilab SDI, Tampa, FL,Bret Schrayer, Semilab SDI, Tampa, FL,Mark Benjamin, Lehighton Electronics Inc,Jacek Lagowski, Semilab SDI, Tampa, FL,Marshall Wilson, Semilab SDI, Tampa, FL,D. Nguyen, Semilab LEI, Lehighton, PADownload PaperLoading...
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2.4.2021 The Phenomenon of Charge Activated Visibility of Electrical Defects In 4H-SiC; Application for Comprehensive Non-Contact Electrical and UV-PL Imaging and Recognition of Critical Defects
M. Wilson, Semilab SDIDavid Greenock, X-FabDmitriy Marinskiy, Semilab SDI, Tampa, FL,Carlos Almeida, Semilab SDIJohn D’Amico, Semilab SDIJacek Lagowski, Semilab SDI, Tampa, FL,Download PaperLoading...
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2.6.2021 Kelvin Force Microscopy and Micro-Raman Correlation Study of Triangular Defects in 4H-SiC
Dmitriy Marinskiy, Semilab SDI, Tampa, FL,M. Wilson, Semilab SDICarlos Almeida, Semilab SDIS. Savtchouk, Semilab SDI,Jacek Lagowski, Semilab SDI, Tampa, FL,S. Toth, Semilab ZRTL. Badeeb, Semilab ZRTA. Faragó, Semilab ZRTDownload PaperLoading...