Frank Kelly

University of Illinois at Urbana-Champaign
  • May 02, 2019 // 3:40pm – 4:30pm

    18.11 Development of GaN Vertical High-Power Devices Enabled by Plasma-Assisted Molecular Beam Epitaxy

    Frank Kelly, University of Illinois at Urbana-Champaign
    Riley Vesto, University of Illinois at Urbana-Champaign
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  • May 12, 2022 // 1:50pm

    16.2 Investigation of Silicon Nitride Shadowed Selective Area Growth as an Enabling Technology for GaN Vertical Device Processing

    Matthew Landi, University of Illinois at Urbana-Champaign
    Frank Kelly, University of Illinois at Urbana-Champaign
    Kyekyoon Kim, University of Illinois at Urbana-Champaign

    Student Presentation

     

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  • May 12, 2022 // 3:20pm

    18.10 Processing of Vertical GaN Power Devices via Silicon Nitride Shadowed Selective Area Growth

    Frank Kelly, University of Illinois at Urbana-Champaign
    Matthew Landi, University of Illinois at Urbana-Champaign
    Kyekyoon Kim, University of Illinois at Urbana-Champaign

    Student Presentation

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  • 15.3.2023 Characterization of Nitridated Ga2O3 for GaN-on-Ga2O3 Power Device Applications

    Matthew Landi, University of Illinois at Urbana-Champaign
    Frank Kelly, University of Illinois at Urbana-Champaign
    Riley Vesto, University of Illinois at Urbana-Champaign
    Marko J. Tadjer, U.S. Naval Research Laboratory
    Kyekyoon Kim, University of Illinois at Urbana-Champaign

    15.3.2023_Landi-KK_CSMantech2023_ExtendedAbstract_CharacterizationOfNitridatedGa2O3