Student Presentation
Frank Kelly
University of Illinois at Urbana-Champaign
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May 02, 2019 // 3:40pm – 4:30pm
18.11 Development of GaN Vertical High-Power Devices Enabled by Plasma-Assisted Molecular Beam Epitaxy
Frank Kelly, University of Illinois at Urbana-ChampaignRiley Vesto, University of Illinois at Urbana-Champaign -
May 12, 2022 // 1:50pm
16.2 Investigation of Silicon Nitride Shadowed Selective Area Growth as an Enabling Technology for GaN Vertical Device Processing
Matthew Landi, University of Illinois at Urbana-ChampaignFrank Kelly, University of Illinois at Urbana-ChampaignKyekyoon Kim, University of Illinois at Urbana-ChampaignDownload Paper -
May 12, 2022 // 3:20pm
18.10 Processing of Vertical GaN Power Devices via Silicon Nitride Shadowed Selective Area Growth
Frank Kelly, University of Illinois at Urbana-ChampaignMatthew Landi, University of Illinois at Urbana-ChampaignKyekyoon Kim, University of Illinois at Urbana-Champaign