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J. Würfl
Ferdinand-Braun-Institut (FBH)
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11.2.1.2024 Defect Reduction and Yield Improvement of MIM Capacitors
S. A. Chevtchenko, Ferdinand-Braun-Institut (FBH)I. Ostermay, Ferdinand-Braun-Institut (FBH)S. Troppenz, Ferdinand-Braun-Institut (FBH)J. Würfl, Ferdinand-Braun-Institut (FBH)O. Hilt, Ferdinand-Braun-Institut (FBH)