J. Würfl

Ferdinand-Braun-Institut (FBH)

  • 11.2.1.2024 Defect Reduction and Yield Improvement of MIM Capacitors

    S. A. Chevtchenko, Ferdinand-Braun-Institut (FBH)
    I. Ostermay, Ferdinand-Braun-Institut (FBH)
    S. Troppenz, Ferdinand-Braun-Institut (FBH)
    J. Würfl, Ferdinand-Braun-Institut (FBH)
    O. Hilt, Ferdinand-Braun-Institut (FBH)
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