Kyle Liddy

Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA

  • Self-Aligned Refractory Metal Gate Scaling in β-Ga2O3 MOSFETs

    Kelson Chabak, Air Force Research Laboratory
    Kyle Liddy, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    Andrew Green, Air Force Research Laboratory
    Thaddeus Asel, Air Force Research Laboratory, Wright Patterson AFB, OH, USA
    Shin Mou, Air Force Research Laboratory, Wright Patterson AFB, OH
    Kevin Leedy, AFRL
    Donald Dorsey, Air Force Research Laboratory Materials and Manufacturing Directorate

    This work characterizes the effects of gate-length (LG) scaling in a self-aligned gate (SAG) β-Ga2O3 MOSFET process. Additional performance gains are expected by extending the SAG process from large LG to sub-micrometer dimensions.  This data incorporates LG scaling down to 200 nm to improve device performance in Ga2O3 SAG MOSFETs using a stepper lithography process to define sub-micron gate lengths.

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  • May 10, 2022 // 4:50pm

    4.3 Transfer of the AFRL 0.14 μm AlGaN/GaN-on-SiC MMIC Process to MACOM’s Commercial Fab

    G. Cueva, MACOM
    E. Werner, KBR, Wright-Patterson AFB
    A. Islam, Air Force Research Laboratory
    N. Miller, Air Force Research Laboratory
    A. Crespo, Air Force Research Laboratory
    N. Sepelak, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    D. Walker Jr., Air Force Research Laboratory
    Gary Hughes, Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH
    R. Fitch, Air Force Research Laboratory
    K. Chabak, Air Force Research Laboratory
    Andrew Green, Air Force Research Laboratory
    Kyle Liddy, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA

    Abstract

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  • May 11, 2022 // 11:40am

    8.3 Device Figure of Merit Performance of Scaled Gamma-Gate β-Ga2O3 MOSFETs

    Kyle Liddy, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    Ahmad Islam, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    Jeremiah Williams, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    Dennis Walker, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    Neil Moser A., Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH,
    Kelson Chabak, Air Force Research Laboratory
    Andrew Green, Air Force Research Laboratory
    Daniel Dryden, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
    N. Sepelak, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA

    Abstract

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