Matthew Dummer

Aeluma, Inc.

  • 6A.2 – Heterogeneous Integration of Large-Area InGaAs SWIR Photodetectors on 300 mm CMOS-Compatible Si Substrates

    B. Shi, Aeluma, Inc.
    Matthew Dummer, Aeluma, Inc.
    Michael McGivney, Aeluma, Inc.
    Simone Suran Brunelli, Aeluma, Inc.
    D. Oakley, Aeluma, Inc.
    Jonathan Klamkin, Aeluma, Inc.

    6A.2 Final.2025

    Abstract
    We demonstrate the heterogeneous integration of SWIR large-area InGaAs photodetectors and pixelated photodetector arrays on 300 mm CMOS-compatible Si (100) substrates through direct heteroepitaxy. The devices exhibit low dark current, high responsivity, low capacitance, and high quantum efficiency at shortwave infrared wavelengths.