Michael Mastro

U.S. Naval Research Laboratory
  • Predicting Vertical GaN Diode Quality using Long Range Optical tests on Substrates

    Francis Kub, U.S. Naval Research Laboratory
    James Gallagher, U.S. Naval Research Laboratory
    Travis Anderson, Naval Research Laboratory
    Andrew Koehler, Naval Research Laboratory
    Mona Ebrish, National Research Council Postdoc Fellow Residing at the U.S. Naval Research Laboratory
    Michael Mastro, U.S. Naval Research Laboratory
    Jennifer Hite, U.S. Naval Research Laboratory
    Karl Holbart, U.S. Naval Research Laboratory

    It is well known that vertical GaN devices could surpass current lateral GaN switch technology due to higher critical electric fields and higher breakdown voltages from its different geometry, and lower impurity concentration from the superior quality of homoepitaxial films. However, the inconsistency of GaN substrate properties, both within wafer and vendor-to-vendor, makes reliable device fabrication difficult. Here we implement long-range spectroscopic studies of GaN substrates and epitaxial wafers using Raman, photoluminescence, and optical profilometry to assess incoming material and correlate to electrical performance of vertical diodes. We have classified incoming wafers into two general types, and determined that inhomogeneities in the wafers can negatively affect the reverse leakage current of PiN diodes.

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