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N. Okamoto
Fujitsu Limited and Fujitsu Laboratories Ltd.
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6.1.2021 GaN Through-substrate Via Process for GaN-on-GaN HEMT Power Amplifiers
N. Okamoto, Fujitsu Limited and Fujitsu Laboratories Ltd.A. Takahashi, Fujitsu Limited and Fujitsu Laboratories LtdY. Minoura, Fujitsu Limited and Fujitsu Laboratories LtdY. Kumazaki, Fujitsu Limited and Fujitsu Laboratories LtdS. Ozaki, Fujitsu Limited and Fujitsu Laboratories LtdJ. Kotani, Fujitsu Limited and Fujitsu Laboratories LtdT. Ohki, Fujitsu Limited and Fujitsu Laboratories LtdN. Kurahash, Fujitsu LimitedM. Sato, Fujitsu LimitedN. Hara, Fujitsu Limited and Fujitsu Laboratories LtdK. Watanabe, Fujitsu Limited and Fujitsu Laboratories LtdDownload Paper