Patrick Fay

University of Notre Dame
  • Full-Wafer, Small-Area Via-Hole Fabrication Process Development for Indium-Bearing III-V Heterostructure Devices

    Yuning Zhao
    Patrick Fay, University of Notre Dame
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  • 16.5 Epitaxial Lift-Off from Native GaN Substrates Using Photoenhanced Wet Etching

    Chris Youtsey, MicroLink Devices, Inc.
    Robert McCarthy, MicroLink Devices
    Rekha Reddy, MicroLink Devices
    Andy Xie, Qorvo
    Ed Beam, Qorvo
    Jingshan Wang, Notre Dame
    Patrick Fay, University of Notre Dame
    Eric Carlson, Virginia Tech
    Lou Guido, Virginia Tech
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  • RF Harmonic Distortion of Coplanar Waveguides on GaN-on-Si and GaN-on-SiC Substrates

    Patrick Fay, University of Notre Dame
    Lina Cao, University of Notre Dame
    Hansheng Ye, University of Notre Dame
    Jingshan Wang, Notre Dame
    Hugues Marchand, IQE
    Wayne Johnson, IQE

    The RF harmonic distortion of coplanar waveguides (CPWs) fabricated on AlGaN/GaN HEMT heterostructures grown on both high-resistivity Si (GaN-on-Si) and semi-insulating SiC (GaN-on-SiC) substrates is reported for the first time. The loss performance and the nonlinear behavior of the CPW lines were experimentally characterized using both small- and large-signal measurements. From 100 MHz to 20 GHz, low loss (less than 0.3 dB/mm at 20 GHz) was achieved; the attenuation of CPW lines on the GaN-on-Si substrate is ~0.05 dB/mm higher than that of the GaN-on-SiC substrate. The harmonic distortion levels of the GaN-on-Si substrate and GaN-on-SiC were also evaluated experimentally; in contrast to the small-signal loss, more significant differences in second- and third-order nonlinearity, and thus intermodulation, are observed between Si and SiC substrates. Large-signal characterization of the GaN-on-Si substrate was carried out over temperature from 25 °C to 175 °C.  Due to increases in substrate conductivity with temperature, the harmonic distortion levels are found to increase significantly at temperatures above 75 °C.

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  • May 12, 2022 // 9:15am

     13.3 Highly-Linear and Efficient mm-Wave GaN HEMT Technology

    Jeong-Sun Moon, HRL Laboratories, Malibu, CA,
    Robert Grabar, HRL Laboratories, Malibu, CA,
    Erdem Arkun, HRL Laboratories, Malibu, CA,
    Joe Tai, HRL Laboratories, Malibu, CA,
    David Fanning, HRL Laboratories, Malibu, CA,
    Patrick Fay, University of Notre Dame
    Joel Wong, HRL Laboratories, Malibu, CA,
    Didiel Vazquez-Morales, HRL Laboratories, Malibu, CA,
    Chuong Dao, HRL Laboratories, Malibu, CA,
    Shyam Bharadwaj, HRL Laboratories, Malibu, CA,
    Nivedhita Venkatesan, University of Notre Dame
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