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Explore
Our Mission
Board of Directors
Executive Committee
Technical Program Committee
Conference
Conference at a Glance
Advance Program & Sessions
Sponsors
Exhibitor
Exhibitor Floorplan
Exhibitor add-ons
Authors
Digests
Contact
Samuel Mony
Skyworks Solutions, Inc.
A New Method for Creating Sloped Resist Profiles Using Mask Structures
Jens Riege, Skyworks Solutions, Inc.
Samuel Mony, Skyworks Solutions, Inc.
Nercy Ebrahimi, Skyworks Solution Inc.
May 12, 2022 // 3:20pm
18.8 Solution-Phase Processed Zinc Oxide Vertical Schottky Diode using Flow-limited Field-Injection Electrostatic Spraying
Samuel Mony, Skyworks Solutions, Inc.
Jiang Li, Skyworks Solutions, Inc.
Nercy Ebrahimi, Skyworks Solution Inc.
Mohammadsadegh Beheshti, Skyworks Solutions Inc.
Student Presentation
Abstract
May 12, 2022 // 3:20pm
18.9 Optimization in Noble Metal Hard Mask Selectivity in Chlorine-Based Plasma Etch
Mohammadsadegh Beheshti, Skyworks Solutions Inc.
Samuel Mony, Skyworks Solutions, Inc.
Jiang Li, Skyworks Solutions, Inc.
Nercy Ebrahimi, Skyworks Solution Inc.
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