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18.4 TDDB and PBTI Characterizations of Fully-Recessed E-mode GaN MIS-FETs with LPCVD-SiNx/PECVD-SiNx Gate Dielectric Stack
Mengyuan Hua, The Hong Kong University of Science and Technology
Qingkai Qian, The Hong Kong University of Science and Technology
Jin Wei, The Hong Kong University of Science and Technology
Zhaofu Zhang, The Hong Kong University of Science and Technology
Gaofei Tang, The Hong Kong University of Science and Technology
Kevin Chen, The Hong Kong University of Science and Technology
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