2.3.2023 Optical and Electrical Methods for Yield Improvement of T-Shaped Gates for AlGaN/GaN HEMT

P. Denis, United Monolithic Semiconductors – GmbH
H. Sahin, United Monolithic Semiconductors – GmbH
Manfred Madel, United Monolithic Semiconductors GmbH
T. Bohm, United Monolithic Semiconductors – GmbH
L. Trinh-Xuan, United Monolithic Semiconductors – GmbH
T. Berndorfer, United Monolithic Semiconductors – GmbH
Alexander Hugger, United Monolithic Semiconductors GmbH, Ulm
M. Amann, United Monolithic Semiconductors – GmbH
H. Stieglauer, United Monolithic Semiconductors Germany
H. Blanck, United Monolithic Semiconductors Germany

2.3.2023_Denis_Final_Paper2.5,2023_Lee_Final_Paper