2.3.2023 Optical and Electrical Methods for Yield Improvement of T-Shaped Gates for AlGaN/GaN HEMT

P. Denis, United Monolithic Semiconductors – GmbH

H. Sahin, United Monolithic Semiconductors – GmbH

Manfred Madel, United Monolithic Semiconductors GmbH

T. Bohm, United Monolithic Semiconductors – GmbH

L. Trinh-Xuan, United Monolithic Semiconductors – GmbH

T. Berndorfer, United Monolithic Semiconductors – GmbH

Alexander Hugger, United Monolithic Semiconductors GmbH, Ulm

M. Amann, United Monolithic Semiconductors – GmbH

H. Stieglauer, United Monolithic Semiconductors Germany

H. Blanck, United Monolithic Semiconductors Germany