Performance and Reliability of AlGaN/GaN HEMT o_blankn 100-mm SiC Substrate with Improved Epitaxial Growth Uniformity

Sangmin Lee, Wavice Inc.
Tim Kennedy
Christer Hallin
Helder Antunes
Brian Fetzer
Scott T. Sheppard
Al Burk, Wolfspeed, A Cree Company
Don A. Gajewski
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