We report the dispersion characteristics of ScAlN/GaN high-electron-mobility transistors (HEMTs) with various epitaxial designs. Devices were fabricated on both ternary (ScAlN) and quaternary (ScAlGaN) materials. The effects of a GaN capping layer was also investigated. We report similar DC and RF performance for all wafers, but significantly worse dispersion which occurs on the quaternary samples. We observe a total gate and drain lag for the ScAlN wafer to be 49% while the ScAlGaN with and without the GaN cap had 10 and 12% dispersion, respectively.
Dennis Walker
Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USA
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Dispersion Characteristics of ScAlN and ScAlGaN HEMTs by Pulsed I-V Measurements
Kelson Chabak., Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USACathy Lee, Qorvo Inc.Yu Cao, Raytheon IDS Microelectronics, Novati Technologies, Inc. IQEAndy Xie, QorvoEdward Beam, QORVOAntonio Crespo, Air Force Research Laboratory, Sensors DirectorateDennis Walker, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USARobert Fitch, AFRLJames Gillespie, Air Force Research LaboratoryAndrew Green, Air Force Research Laboratory, Sensors DirectorateDownload Paper -
14.4 Device Development of Gallium Oxide MOSFETs Grown by MOVPE on Native Substrates for High-Voltage Applications
Neil Moser A., Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH,Kelson Chabak, Air Force Research Laboratory, Sensors DirectorateAndrew Green, Air Force Research Laboratory, Sensors DirectorateDennis Walker, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USAStephen Tetlak, AFRLEric Heller, AFRLAntonio Crespo, Air Force Research Laboratory, Sensors DirectorateRobert Fitch, AFRLJonathan McCandless, AFRLKevin Leedy, Air Force Research Laboratory, Sensors DirectorateMichele Baldini, Leibniz-Institut für KristallzüchtungGuenter Wagner, Leibniz-Institut für KristallzüchtungGlen Via, AFRLJohn Blevins, Air Force Research Laboratory (AFRL), Wright-Patterson AFB, OHGregg Jessen, AFRL -
May 11, 2022 // 11:40am
8.3 Device Figure of Merit Performance of Scaled Gamma-Gate β-Ga2O3 MOSFETs
Kyle Liddy, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USAAhmad Islam, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USAJeremiah Williams, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USADennis Walker, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USANeil Moser A., Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH,Kelson Chabak, Air Force Research Laboratory, Sensors DirectorateAndrew Green, Air Force Research Laboratory, Sensors DirectorateDaniel M. Dryden, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USANicholas P. Sepelak, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USADownload PaperLoading... -
7.3.2023 Scaled ?-Ga2O3 MOSFETs with Pulsed Laser Deposition-Regrown Ohmics
Daniel M. Dryden, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USAHyung Min Jeon, KBR Inc.,Kyle Liddy, Air Force Research LaboratoryAhmad Islam, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USADennis E. Walker Jr., Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH,Jeremiah C. Williams, Air Force Research Laboratory, Sensors DirectorateNicholas P. Sepelak, KBR, Air Force Research Laboratory Sensors Directorate, WPAFB, OH, USANolan S. Hendricks, Air Force Research Laboratory, Sensors DirectorateKevin Leedy, Air Force Research Laboratory, Sensors DirectorateKelson Chabak, Air Force Research Laboratory, Sensors DirectorateAndrew J. Green, Air Force Research Laboratory, Sensors Directorate, Wright-Patterson AFB, OH,