J. C. Gallagher

Naval Research Laboratory
  • May 12, 2022 // 3:20pm

    18.6 Chemical Mechanical Polishing of β-Ga2O3

    M.S. Goorsky, University of California, Los Angeles, CA USA
    M. E. Liao, University of California, Los Angeles, CA USA
    K. Huynh, University of California, Los Angeles, CA USA
    W. Olsen, University of California, Los Angeles, CA USA
    X. Huang, Argonne National Laboratory
    M. Wojcik, Argonne National Laboratory
    J. C. Gallagher, Naval Research Laboratory
    T. J. Anderson, Naval Research Laboratory
    Y. Wang, University of California, Los Angeles, CA USA

    Student Presentation

    Abstract

    Download Paper