Student Presentation
J. C. Gallagher
Naval Research Laboratory
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May 12, 2022 // 3:20pm
18.6 Chemical Mechanical Polishing of β-Ga2O3
M.S. Goorsky, University of California, Los Angeles, CA USAM. E. Liao, University of California, Los Angeles, CA USAK. Huynh, University of California, Los Angeles, CA USAW. Olsen, University of California, Los Angeles, CA USAX. Huang, Argonne National LaboratoryM. Wojcik, Argonne National LaboratoryJ. C. Gallagher, Naval Research LaboratoryT. J. Anderson, Naval Research LaboratoryY. Wang, University of California, Los Angeles, CA USADownload Paper